潘扶民

Photoconduction properties of crystalline Selenium based photodetectors with Gallium Oxide hole blocking layer

工學院半導體材料與製程設備學程・共同指導：吳耀銓

結晶硒、可見光感測器、暗電流、亮電流、阻障層、crystalline selenium、visible light photodetector、dark current、photocurrent、blocking layer

Gas sensing properties of PdO nanoflake and ZnO thin film gas sensors toward reducing gases

材料科學與工程學系所

氧化鈀、鈀、氧化鋅、鉑奈米粒子、乙醇、氫、脫氫反應、還原反應、濕度、PdO、Pd、Pt nanoparticles、ethanol、hydrogen、dehydrogenation、reduction、humidity

Optimization of Photoconductive Properties of Selenium Based Photodetector using Ultra Thin Dielectrics as the Charge Blocking Layer

材料科學與工程學系所

結晶硒、非晶質硒、光感測器、電荷阻障層、氧化鉿、氧化鋁、氮化矽、氧化矽、氧化鎵、晶粒尺寸、表面粗糙度、暗電流、光電流、載子捕獲、界面能障、Fowler-Nordheim穿隧、量子效率、c-Se、a-Se、photodetector、CBL、HfO2、Al2O3、Si3N4、SiO2、Ga2O3、grain size、surface roughness、dark current、photocurrent、charge trapping、junction barrier、Fowler-Nordheim tunneling、quantum efficiency

Gas Sensing Behavior of Sputter-Deposited Zinc Oxide Thin Film toward Reducing Gases

材料科學與工程學系所

氧化鋅、乙醇、丙酮、一氧化碳、氫氣、金屬氧化物半導體、濕度、貴金屬Pt修飾、溢出現象、ZnO、ethanol、acetone、CO、hydrogen、metal oxide semiconductor、humidity、Pt decoration、spillover

Preparation and Optimization of Crystalline Selenium Thin Films as the Photoconductor of Visible Light Detectors

材料科學與工程學系所

結晶硒、非晶硒、可見光感測器、暗電流、電洞阻障層、失效電場、crystalline selenium、amorphous selenium、visible light photodetector、dark current、hole blocking layer、breakdown field

Study of Capacitive Extended Gate Nanobelt Field Effect Transistors as Biosensors

材料科學與工程學系奈米科技碩博士班・共同指導：許鉦宗

奈米帶場效應電晶體、延伸式電容電極、生物感測器、鏈霉親和素、抗生物素蛋白、肉毒桿菌神經毒素A型、電流補償方法、補充臨時電壓方法、延伸式電容電極場效應電晶體生物感測器原型機、電壓耦合效率、Nanobelt field-effect transistor、capacitive extended gate、biosensor、streptavidin、avidin、botulinum neural toxin type-A、current compensation method、supplement temporary voltage method、prototype EGFET biosensor、potential coupling efficiency

Improvement of Solder Cap Deformation in Flip-Chip Packaging Process

工學院半導體材料與製程設備學程

覆晶腳位陣列封裝、銅柱凸塊、錫帽、底部填充劑、防焊層、封模、FCLGA、copper pillar bump、solder cap、underfill、solder mask、molding

Photoconduction properties of crystalline selenium based photodetectors with a lateral MISIM device structure

材料科學與工程學系所

結晶硒、可見光感測器、暗電流、亮電流、阻障層、雪崩效應、crystalline selenium、visible light photodetector、dark current、photocurrent、blocking layer、avalanche、multiplication、gain

Photovoltaic characteristics of crystalline Se based Schottky junction solar cells

材料科學與工程學系所

蕭特基接面太陽能電池、結晶硒、氧化鋅、電子傳輸層、載子複合損失、Schottky junction solar cell、crystalline selenium、zinc oxide、electron transport layer、carrier recombination loss

Leakage Current Reduction for Low Voltage Regulators Based on Zener Diodes

工學院半導體材料與製程設備學程

低電壓調節器、漏電流、Low Voltage Regulator、Leakage Current

The size effect of Pt nanoparticles on the electrocatalytic activity toward methanol oxidation reaction. 研

材料科學與工程學系所

電漿輔助原子氣相沉積、射頻濺鍍沉積、甲醇氧化反應、白 金奈米粒子、氧化鈦、氧化銦錫、雙官能基機制、電荷轉移效應、計 時電流法量測、Plasma enhanced atomic layer deposition、magnetron sputtering、methanol oxidation reaction、bifunctional mechanism、electronic effect、chronoamperometric measurement

Study of Silicon Nano-electronic Devices as biosensor and gas sensor

材料科學與工程學系奈米科技碩博士班・共同指導：許鉦宗

奈米線、環繞式閘極、無接面電晶體、反轉式電晶體、矽奈米帶、區域焦耳熱、電漿增進原子層沉積、電漿輔助化學氣相沈積、選擇性沉積、nanowire (NW)、gate-all-around (GAA)、transistor、junctionless (JL)、inversion mode (IM)、silicon nanobelt、localized Joule heating、plasma-enhanced atomic layer deposition、plasma-enhanced chemical vapor deposition、selective deposition

Performance Optimization of Diamond Disks for Polishing Pad Conditioning during Chemical Mechanical Polishing Process

工學院半導體材料與製程設備學程

化學機械研磨、研磨墊、鑽石碟、研磨液、晶圓移除率、CMP、Disk、Pad、Slurry、Removal Rate

Minimization of Potential Induced Degradation for Silicon Based Solar Cells

工學院半導體材料與製程設備學程

電位誘導衰變現象、PID效應、Potential induced degradation、PID effect

Improvement of Optical Efficiency and Crosstalk with A Trench Color Filter Scheme

工學院半導體材料與製程設備學程

CMOS影像感測器、光學效率、光干涉、內嵌結構、時域有限差分法、CMOS image sensor、optical efficiency、crosstalk、embeded trenched color filter、FDTD

Optimization of Deposition of Amorphous Carbon Core Film to Alleviate Pattern Wiggling in the Self-aligned Double Patterning Process

工學院半導體材料與製程設備學程

圖案扭動、自對準雙重圖形、非晶碳、蝕刻速率、wiggling、SADP(Self-aligned double patterning)、amorphous carbon、etch selectivity

Temperature and Doping Concentration Dependent Characteristics of Junctionless Gate-All-Around Nanowire Poly-Si Transistors

材料科學與工程學系奈米科技碩博士班・共同指導：許鉦宗

溫度關聯性、摻雜濃度關聯性、奈米線、環繞式閘極、電晶體、多晶矽、多通道、無介面、反轉模式、Temperature dependence、doping concentration dependence、nanowire (NW)、gate-all-around (GAA)、transistor、polycrystalline silicon (poly-Si)、junctionless (JL)、inversion mode (IM)、multiple channel

Mechanistic Study of Acetone Gas Sensing of Palladium Oxide Nanoflake Thin Film at Temperatures below 250oC

材料科學與工程學系所

氧化鈀、丙酮、反應性濺鍍沉積、金屬氧化物半導體、化學氣體感測器、揮發性有機化合物、氧離子吸附模式、PdO、acetone、reactive sputter-deposition、metal oxide semiconductor、chemical gas sensor、volatile organic compound、oxygen ionosorption model

Hydrogen gas sensors from polysilicon nanobelt devices selectively modified with sensing materials

材料科學與工程學系奈米科技碩博士班・共同指導：許鉦宗

氫傳感器、多晶矽奈米帶、選擇性修飾、焦耳熱、hydrogen sensor、polysilicon nanobelt、selectively functionalization、Joule-heating

Acetone gas sensing by PdO nanoflake thin films

材料科學與工程學系奈米科技碩博士班

氧化鈀、奈米片薄膜、白金奈米粒子、丙酮感測、丙酮、PdO、Pt nanoparticles、nanoflake、acetone sensing、acetone

Study of JL and IM Gate-All-Around Poly-Si Nanowire TFTs as SONOS Memory device

材料科學與工程學系奈米科技碩博士班・共同指導：許鉦宗

薄膜記憶體、無接面式元件、反轉式元件、環繞式閘極、非揮發性記憶體、Thin-film transistor、Junctionless、Inversion mode、Gate-all-around、Si Nanowire、SONOS memory

Hydrogen and Humidity Sensors from Si Nanodevices with Selective Modifications via Nanoscale Joule Heating

材料科學與工程學系奈米科技碩博士班・共同指導：許鉦宗

氫氣感測器、焦耳熱、濕度感測器、白金、氧化鋅、Hydrogen sensor、Joule Heating、Humidity sensor、Platinum、Zinc oxide

Study of Inversion mode and Junctionless Gate-All-Around Poly-Si Ultra-Thin Nanowire Thin-Film Transistors

材料科學與工程學系奈米科技碩博士班・共同指導：許鉦宗

側壁邊襯、奈米線、平台結構、環繞式閘極、電晶體、多晶矽、多通道、無接面、反轉模式、非揮發性記憶體、Sidewall spacer、nanowire (NW)、mesa structure、gate-all-around (GAA)、transistor、polycrystalline silicon (poly-Si)、junctionless (JL)、inversion mode (IM)、multiple channel、nonvolatile memory、SONOS

Effect of PdO nanoparticles Decoration on CO sensing Behavior of SnO2

工學院半導體材料與製程設備學程

射頻濺鍍、二氧化錫薄膜、氧化鈀奈米粒修飾、一氧化碳氣體感測、金屬鈀氧化還原、RF Sputter、SnO2 thin film、PdO nanoparticle decoration、CO gas sensing、Pd oxidation and reduction

The size effect of Pt nanoparticles deposited on indium tin oxide on the catalytic methanol oxidation reaction

材料科學與工程學系所

射頻濺鍍沉積、甲醇氧化反應、白金奈米粒子、氧化銦錫、雙官能基機制、電子效應、RF sputtering、DMFC、Methanol electro-oxidation、ITO、Size effect、Bifunctional mechanism、Electronic effect

Low Thermal Budget Amorphous Silicon for Fabrication of Photovoltaic and Non-volatile Memory Devices

材料科學與工程學系所・共同指導：謝嘉民

系統面板、三維垂直堆疊晶片、低熱預算技術、感應耦合電漿、遠紅外光雷射活化、光補捉、非晶矽太陽能電池、薄多晶矽通道電晶體、能隙工程、電荷儲存型非揮發性記憶體、物聯網、System on panel、onolithic 3D integration、low thermal budget、inductively coupled plasma chemical vapor deposition、green nanosecond spike annealing、far-infrared laser activation、light-trapping、a-Si thin-film solar cells、field-effect transistor、thin poly-Si channel、band-gap engineering、charge-trap non-volatile memories、Internet of Things

Dark current suppression and thermal stability improvement for amorphous selenium based photosensors

材料科學與工程學系所

非晶硒、電洞阻障層、多層膜結構、光感測元件、Amorphous Se (a-Se)、hole blocking layer (HBL)、multilayer structure、photosensor

Study on Minimization of the Dry Etch Undercut for High Temperature Aluminum Process

工學院半導體材料與製程設備學程

金屬層蝕刻、底切、高溫鋁製程、金屬線底切、metal etch、undercut、high temperature aluminum process、metal undercut

Preparation of Crystalline Selenium Thin Films as the Photoconductor of Visible Light Image Sensors

材料科學與工程學系所

結晶硒、非晶硒、光感測器、暗電流、電洞阻障層、雪崩效應、crystalline selenium、amorphous selenium、photodetector、hole blocking layer、avalanche multiplication

Effects of PdO Decoration on CO Sensing Behavior of SnO2 at Low Temperatures

材料科學與工程學系所

氧化鈀修飾、二氧化錫薄膜、一氧化碳感測器、氧化鈀還原、金屬鈀、PdO decoration、SnO2 thin film、CO gas sensor、PdO reduction、metal Pd

Gas sensing properties of PdO nanoflake thin films at low temperatures

材料科學與工程學系所

氧化鈀、鈀、鉑奈米粒子、奈米片、一氧化碳感測、氫氣感測、感測機制、氧化鈀還原、鈀氧化、裂解吸附、PdO、Pd、Pt nanoparticles、nanoflake、CO sensing、H2 sensing、sensing mechanism、PdO reduction、Pd reoxidation、dissociative adsorption

ESD protection improvement and Failure Analysis for 0.13µm high voltage device Electrostatic Discharge Protection for High Voltage Devices in Liquid crystal Display Driver Integrated Circuits

工學院半導體材料與製程設備學程

靜電放電、高壓元件、ESD、High Voltage Device

Optimization of the Ion Implant to improve the Write Characteristics of the Capacitor-Coupling Non-Volatile Memory Device

工學院半導體材料與製程設備學程

唯讀記憶體、非揮發性記憶體、耦合作用、離子佈植、袋狀佈植、輕汲極摻雜、熱電子效應、熱電洞效應、能帶對能帶穿隧效應、浮閘極、控制閘、截止電壓、編程效率、抹除效率、Read-Only Memory、Non-Volatile Memory Device、Coupling Effect、Ion Implant、Pocket Implant、Punch Through、Hot Electron Injection、Hot Hole Injection、Floating Gate、Control Gate、Band-to-Band Tunneling Effect、Threshold Voltage

Study on amorphous carbon as the anode material for high power lithium ion batteries

理學院應用科技學程

鋰電池、非晶質碳材、負極、Lithium ion battery、amopous carbon、anode

The interfacial electronic and magnetic properties in Alq3-based organic spin valve devices

材料科學與工程學系奈米科技碩博士班・共同指導：許鉦宗、許瑤真

表面、在有機自旋閥、Interface、organic spin valves、spin polarization、orbital hybridization

CO and CH4 Gas Sensing by PdO Nanoflake Thin Films at Low Temperatures

材料科學與工程學系所

氧化鈀、氣體感測器、一氧化碳、甲烷、PdO、Gas sensor、CO、CH4

CO sensing by reactive-sputter-deposited PdO nanoflakes at atmospheric pressure

工學院半導體材料與製程設備學程

氧化鈀、奈米片、一氧化碳、氣體感測、PdO、nanoflake、CO、gas sensor

Plasma enhanced atomic layer deposition of Pt nanoparticles for studying the size effect on the electrocatalytic activity toward methanol oxidation reaction

材料科學與工程學系所

電漿原子層沉積法、甲醇氧化反應、白金奈米粒、二氧化鈦、雙官能基機制、Pt、PEALD、TiO2、Methanol、electro-oxidation、DMFC、Size effect

CO gas sensing properties of porous Co3O4 nanoflake thin films prepared by chemical bath deposition

材料科學與工程學系所

四氧化三鈷、孔洞性、奈米片、一氧化碳氣體感測、化學浴沉積法、Co3O4、Porous、Nanoflake、CO gas sensing、Chemical bath deposition

Failure Analysis of SRAM Using Dual Thermal Measurement System

工學院半導體材料與製程設備學程

雙加熱系統、Dual Thermal Measurement

Fabrication and optimization of Flexible Organic complementary inverter Thin Film Transistor

工學院半導體材料與製程設備學程

有機薄膜電晶體、互補式反相器、軟性面板、有機半導體、有機材料、OTFT、complementary inverter、flexible display、organic semiconductor、organic material

The effect of quantity reduction of photosensitive polyimide on the uniformity and film quality of the spin-coated passivation layer in integrated circuits

工學院半導體材料與製程設備學程

感光性聚亞醯胺、旋轉塗佈、鈍化層、均勻性、光阻減量、photosensitive polyimide、spin coating、passivation layer、uniformity、photoresist reduction

Microcrystalline Si material for the application of electronic and photovoltaic devices

材料科學與工程學系所・共同指導：謝嘉民

微結晶矽、漸變式p型窗口層、熱燈絲化學氣相沉積系統、薄膜電晶體、雙金屬閘結構、感應耦合式化學氣相沉積系統、Microcrystalline Si、Graded p-type window layer (GPL)、Hot-wire chemical vapor deposition (HWCVD)、Thin film transistors (TFT)、Double-metal-gate

Electrooxidation of methanol catalyzed by Pt nanoparticles deposited by Plasma-Enhanced Atomic Layer Deposition

材料科學與工程學系所・共同指導：許鉦宗、吳樸偉、張淑閔

原子層沉積系統、甲醇氧化反應、白金奈米粒子、二氧化鈦、雙官能基機制、電荷轉移效應、atomic layer deposition、methanol oxidation reaction、Pt nanoparticles、TiO2、bifunctional mechanism、electronic effect

ESD Machine Model Failures Caused by The Distorted Waveforms During Multiple-pin Zapping

工學院半導體材料與製程設備學程

靜電防護、機械模式、ESD、machine model、waveform、JEDEC、SPICE

Dependence of Deposition Conditions of a-Si:H Thin Films on the Photovoltaic Properties of p-i-n Photodetectors

平面顯示技術碩士學位學程

氫化非晶矽薄膜、p-i-n光感測器、X光影像系統、暗電流、電漿輔助化學汽相沉積系統、內建電場、微結構因子、a-Si:H、p-i-n photodiode、X-Ray detector imaging application、leakage current、PECVD、built-in potential、microstructure factor

Electrical Resistivity Minimization of Chemical Vapor Deposited Titanium Nitride Barrier layers and Tungsten plugs for Integrated Circuit Interconnects

工學院半導體材料與製程設備學程

氮化鈦、鎢、CVD-TiN、CVD-W

Multi-walled CNT-assisted polymer gas sensor array for electronic nose

材料科學與工程學系所・共同指導：郭正次

多壁碳奈米管、氣體感測元件、電子鼻系統、Carbon nanostructures、Gas-sensing devices、Sensing mechanism

Failure Analysis of Threshold Voltage Shift of High-Voltage Metal-Oxide-Semiconductor Field –Effect Transistors

工學院半導體材料與製程設備學程

高壓、爐管、HV、furnace

Optimization of the Gate - Drain Capacitance to Improve the Switching Performance of Trench Power Metal-Oxide-Semiconductor Field-Effect Transistors

工學院半導體材料與製程設備學程

溝槽型功率電晶體、閘極電容、切換速率、導通電阻、Trench Power MOSFET、Gate - Drain Capacitance、Switching Performance、on-resistance

Development of amorphous selenium (a-Se) stack layers for

材料科學與工程學系所

非晶硒、感光接收器、暗電流、X光檢測器、雪崩倍增、CeO2電洞阻障層、Sb2S3電子阻障層、分散電阻層、Amorphous Se、x-ray detector、high-gain avalanche rushing amorphous photoconductors、HARP、avalanche multiplication、hole blocking layer、electron blocking layer、distributed resistive layer

CO gas sensing by ZnO nanoflake thin films

材料科學與工程學系所

氧化鋅、奈米片、一氧化碳感測、化學浴沉積法、ZnO、Nanoflakes、CO gas sensing、Chemical bath deposition

Plasma Enhanced Atomic Layer Deposition of Pt nanoparticles on the TiO2 substrate as the catalyst for Direct Methanol Fuel Cells

材料科學與工程學系所

直接甲醇燃料電池、原子層沉積系統、甲醇氧化反應、一氧化碳容忍度、白金奈米粒子、二氧化鈦、雙官能基機制、電荷轉移效應、direct methanol fuel cells、DMFC、atomic layer deposition、methanol oxidation reaction、CO tolerance、Pt nanoparticles、TiO2、bi-functional mechanism、electronic effect

Optimization of Electrochemical Etch Processes of Aluminum Foils to Improve the Reliability of Middle-High Voltage Electrolytic Capacitors

理學院應用科技學程

陽極箔、電蝕箔、化成箔、電蝕、化成、Anode foil、Etching foil、Forming foil、Etching、Forming

The effect of the surface treatment of TiO2 nanocrystals on the cell efficiency of dye sensitized solar cells

工學院半導體材料與製程設備學程

奈米二氧化鈦、異丙基純氧鈦、四氯化鈦、TiO2、TTIP、TiCl4

Dislocation Improvement and Yield Enhancement for the Process of the Shallow Trench Isolation of High Voltage Semiconductor Devices

工學院半導體材料與製程設備學程

互補式金氧半高壓、內墊氧化矽層、內墊氮化矽層、HV CMOS、Liner Oxide、Liner Nitride

The Effect of the Surface Treatment of Polyimide on Adhesion Properties of Flip Chip Package

工學院半導體材料與製程設備學程

聚乙醯胺、覆晶封裝、填充底膠、界面脫層、表面處理、錫鉛凸塊、電漿、金屬薄膜、polyimide、Flip Chip、Underfill、delamination、surface treatment、solder bump、Plasma、UBM

CMP Micro Scratch Root Cause and its Improvement

工學院半導體材料與製程設備學程

化學機械研磨、微刮傷、CMP、micro-scratch

CO gas sensing by PdO nanoflake thin film

材料科學與工程學系所

氧化鈀、奈米片狀結構、一氧化碳、氣體感測、活性濺鍍沉積法、PdO、nanoflake、CO、gas sensing、reactive sputter deposition